ACOPOS 6D
10 Shuttle sizes (120x120 – 450x450mm) 10 shuttle sizes (160x160 – 600x600mm) Shuttle payload 0,6 - 20kg 1,8 - 40kg Segment size 240 x 240 x 7 0mm and 480 x 120 x 70 mm 320 x 320 x 80 mm Max. speed 3m/s [...] 3m/s 3m/s Max. acceleration 20m/s² 20m/s² Levitation height 0,5 – 4mm 0,5 – 6mm Positioning accuracy < 5 µm < 10 µm Shuttle rotation <20mrad (X,Y), <20° (Z) <20mrad (X,Y), <20° (Z) Protection class IP67 IP67 [...] degrees of freedom. The maintenance-free permanent magnet shuttles are available in 19 sizes (120 x 120 to 600 x 600 mm) and reach every target point with repeatability of less than 5 µm (S3) or 10 µm (S4)