ACOPOS 6D
80 mm Max. speed 3m/s 3m/s Max. acceleration 20m/s² 20m/s² Levitation height 0,5 – 4mm 0,5 – 6mm Positioning accuracy < 5 µm < 10 µm Shuttle rotation <20mrad (X,Y), <20° (Z) <20mrad (X,Y), <20° (Z) Protection [...] Sulfuric Acid (H 2 SO 4 ), Phosphoric Acid (H 3 PO 4 ), Nitric Acid (HNO 3 ), Hydrofluoric Acid (HF); Chlorine and Halogens, such as Wet Chlorine Gas, Hypochlorites, Chlorine Dioxide (ClO 2 ), Ferric and [...] in 19 sizes (120 x 120 to 600 x 600 mm) and reach every target point with repeatability of less than 5 µm (S3) or 10 µm (S4). Hygienic and aseptic surface options made of stainless steel (AISI 316L) are