ACOPOS 6D
10 Shuttle sizes (120x120 – 450x450mm) 10 shuttle sizes (160x160 – 600x600mm) Shuttle payload 0,6 - 20kg 1,8 - 40kg Segment size 240 x 240 x 7 0mm and 480 x 120 x 70 mm 320 x 320 x 80 mm Max. speed 3m/s [...] degrees of freedom. The maintenance-free permanent magnet shuttles are available in 19 sizes (120 x 120 to 600 x 600 mm) and reach every target point with repeatability of less than 5 µm (S3) or 10 µm (S4) [...] Sulfuric Acid (H 2 SO 4 ), Phosphoric Acid (H 3 PO 4 ), Nitric Acid (HNO 3 ), Hydrofluoric Acid (HF); Chlorine and Halogens, such as Wet Chlorine Gas, Hypochlorites, Chlorine Dioxide (ClO 2 ), Ferric and